Dr. Margaret M. Murnane
at JILA
SPIE Involvement:
Author
Publications (40)

Proceedings Article | 22 February 2021 Presentation + Paper
Proc. SPIE. 11611, Metrology, Inspection, and Process Control for Semiconductor Manufacturing XXXV
KEYWORDS: Signal to noise ratio, Metrology, Defect detection, Cameras, Sensors, X-rays, Scatterometry, Extreme ultraviolet, Model-based design, Defect inspection

Proceedings Article | 20 December 2019 Paper
Proc. SPIE. 11209, Eleventh International Conference on Information Optics and Photonics (CIOP 2019)
KEYWORDS: Ultrafast phenomena, Femtosecond phenomena, Ferromagnetics, Magnetism, Physics

Proceedings Article | 26 March 2019 Presentation
Proc. SPIE. 10959, Metrology, Inspection, and Process Control for Microlithography XXXIII
KEYWORDS: Stereoscopy, Reflectometry, Extreme ultraviolet, 3D image processing

Proceedings Article | 23 April 2018 Paper
Proc. SPIE. 10600, Health Monitoring of Structural and Biological Systems XII
KEYWORDS: Metamaterials, Ultrafast phenomena, Near infrared, Diffraction, Spectroscopy, Crystals, Extreme ultraviolet, Thermoelectric materials, Acoustics, Nanolithography

Proceedings Article | 13 March 2018 Presentation + Paper
Proc. SPIE. 10585, Metrology, Inspection, and Process Control for Microlithography XXXII
KEYWORDS: Thin films, Nanostructures, Diffraction, Coherence imaging, Nanostructuring, Nickel, Silicon, Wave propagation, Extreme ultraviolet, Acoustics

Showing 5 of 40 publications
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