Margareta Paunescu
Scientist 2 at EMD Performance Materials Corp
SPIE Involvement:
Author
Publications (7)

Proceedings Article | 25 March 2016
Proc. SPIE. 9779, Advances in Patterning Materials and Processes XXXIII
KEYWORDS: Optical lithography, Etching, Polymers, Annealing, Silicon, Scanning electron microscopy, Directed self assembly, Line edge roughness, Photomicroscopy, Semiconducting wafers

Proceedings Article | 20 March 2015
Proc. SPIE. 9425, Advances in Patterning Materials and Processes XXXII
KEYWORDS: Thin films, Etching, Dry etching, Polymers, Annealing, Coating, Scanning electron microscopy, Directed self assembly, Plasma etching, Photomicroscopy

Proceedings Article | 16 April 2011
Proc. SPIE. 7972, Advances in Resist Materials and Processing Technology XXVIII
KEYWORDS: Lithography, Contamination, Deep ultraviolet, Polymers, Diffusion, Chemistry, Inspection, Critical dimension metrology, Photoresist processing, Semiconducting wafers

Proceedings Article | 1 April 2009
Proc. SPIE. 7273, Advances in Resist Materials and Processing Technology XXVI
KEYWORDS: Gold, Polymers, Copper, Silicon, Coating, Chemistry, Fourier transforms, Plating, Photoresist processing, Semiconducting wafers

Proceedings Article | 26 March 2008
Proc. SPIE. 6923, Advances in Resist Materials and Processing Technology XXV
KEYWORDS: Lithography, Copper, Silicon, Chemistry, Oxygen, Plating, Thin film coatings, Photoresist processing, Semiconducting wafers, Electroplating

Showing 5 of 7 publications
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