Ms. María Jesús López-Bosque
at Consejo Superior de Investigaciones Científicas
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | April 24, 2003
Proc. SPIE. 5116, Smart Sensors, Actuators, and MEMS
KEYWORDS: Electronics, Gas sensors, Sensors, Etching, Glasses, Annealing, Silicon, Platinum, CMOS technology, Semiconducting wafers

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