Maria Jesús Oliver-Gomez
at Univ de Castilla-La Mancha
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | May 5, 2011
Proc. SPIE. 8066, Smart Sensors, Actuators, and MEMS V
KEYWORDS: Microelectromechanical systems, Ferroelectric materials, Resonators, Silicon, Biosensors, Atomic force microscopy, Latex, Aluminum nitride, Zinc oxide, Liquids

PROCEEDINGS ARTICLE | May 19, 2009
Proc. SPIE. 7362, Smart Sensors, Actuators, and MEMS IV
KEYWORDS: Microelectromechanical systems, Proteins, Molecules, Silicon, Hydrogen, Nitrogen, Reliability, Atomic force microscopy, Adsorption, Aluminum nitride

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