Dr. Maria S. Mikhailova
at MIET
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | December 30, 2016
Proc. SPIE. 10224, International Conference on Micro- and Nano-Electronics 2016
KEYWORDS: Oxides, Thin films, Etching, Electrodes, Germanium, Atomic force microscopy, Microelectronics, Chemical elements, Antimony, Tellurium

PROCEEDINGS ARTICLE | December 18, 2014
Proc. SPIE. 9440, International Conference on Micro- and Nano-Electronics 2014
KEYWORDS: Annealing, Copper, Silver, Coating, Plating, Calorimetry, Cyanide, Thermodynamics, Temperature metrology, Tin

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