Marian Hanf
at Technische Univ Chemnitz
SPIE Involvement:
Author
Publications (3)

PROCEEDINGS ARTICLE | January 22, 2005
Proc. SPIE. 5717, MEMS/MOEMS Components and Their Applications II
KEYWORDS: Signal to noise ratio, Optical filters, Mirrors, Sensors, Electrodes, Spectroscopy, Computer programming, Micromirrors, Semiconducting wafers, Signal detection

PROCEEDINGS ARTICLE | January 22, 2005
Proc. SPIE. 5716, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS IV
KEYWORDS: Microelectromechanical systems, Mirrors, Doppler effect, Interferometers, Manufacturing, Numerical simulations, Finite element methods, Micromirrors, Signal analyzers, Semiconducting wafers

PROCEEDINGS ARTICLE | April 7, 2004
Proc. SPIE. 5445, Microwave and Optical Technology 2003

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