Dr. Marie K. Tripp
Technologist at Intel Corp
SPIE Involvement:
Author
Publications (4)

PROCEEDINGS ARTICLE | April 21, 2016
Proc. SPIE. 9778, Metrology, Inspection, and Process Control for Microlithography XXX
KEYWORDS: Thin films, Nanostructures, Metrology, Nanostructuring, Dielectrics, Physics, Thermal effects, Extreme ultraviolet, Phonons, Photoacoustic spectroscopy, Acoustics, Laser optics, Thermal modeling, Nanostructured thin films, Nanowires

PROCEEDINGS ARTICLE | April 10, 2013
Proc. SPIE. 8681, Metrology, Inspection, and Process Control for Microlithography XXVII
KEYWORDS: Thin films, Nanostructures, Nanostructuring, Interfaces, Silicon, Silicon films, Transducers, Extreme ultraviolet, Picosecond phenomena, Acoustics

PROCEEDINGS ARTICLE | April 3, 2012
Proc. SPIE. 8324, Metrology, Inspection, and Process Control for Microlithography XXVI
KEYWORDS: Thin films, Nanostructures, Nickel, Silicon, Silicon films, Wave propagation, Extreme ultraviolet, Photoacoustic spectroscopy, Velocity measurements, Acoustics

PROCEEDINGS ARTICLE | January 22, 2005
Proc. SPIE. 5720, Micromachining Technology for Micro-Optics and Nano-Optics III
KEYWORDS: Microelectromechanical systems, Mirrors, Multilayers, X-rays, Silicon, Coating, Reflectivity, Atomic layer deposition, Micromirrors, Aluminum

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top