Dr. Marius Gabriel Ivan
Researcher at Holst Ctr
SPIE Involvement:
Author
Publications (3)

PROCEEDINGS ARTICLE | September 9, 2010
Proc. SPIE. 7750, Photonics North 2010
KEYWORDS: Gold, Microfluidics, Optical lithography, Electrodes, Polymers, Silicon, Manufacturing, Semiconducting wafers, Optics manufacturing, Positron emission tomography

PROCEEDINGS ARTICLE | December 10, 2009
Proc. SPIE. 7520, Lithography Asia 2009
KEYWORDS: Gold, Lithography, Optical lithography, Electrodes, Silicon, Transistors, Maskless lithography, Critical dimension metrology, Semiconducting wafers, Flexible circuits

PROCEEDINGS ARTICLE | March 18, 2009
Proc. SPIE. 7271, Alternative Lithographic Technologies
KEYWORDS: Lithography, Electron beam lithography, Optical lithography, Electrodes, Silicon, Manufacturing, Scanning electron microscopy, Photoresist materials, Nanoimprint lithography, Semiconducting wafers

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