Dr. Marius Przybylski Profile

Dr. Marius Przybylski

President at ATL Lasertechnik GmbH

SPIE Involvement:

Author

Proceedings Article | 18 February 2012 Paper

Influence of laser-generated surface structures on electrochemical performance of lithium cobalt oxide

R. Kohler, J. Proell, S. Ulrich, M. Przybylski, H. J. Seifert, W. Pfleging

Proceedings Volume 8244, 82440T (2012) https://doi.org/10.1117/12.906707

KEYWORDS: Lithium, Pulsed laser operation, Cobalt, Oxides, Thin films, Annealing, Electrodes, Crystals, Manufacturing, Scanning electron microscopy

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Proceedings Article | 18 February 2012 Paper

Laser-adjusted three-dimensional Li-Mn-O cathode architectures for secondary lithium-ion cells

J. Pröll, R. Kohler, M. Torge, M. Bruns, M. Przybylski, S. Ulrich, H. J. Seifert, W. Pfleging

Proceedings Volume 8244, 82440S (2012) https://doi.org/10.1117/12.906714

KEYWORDS: Annealing, Thin films, Diffusion, Lithium, Laser processing, Manganese, Electrodes, Raman spectroscopy, Oxides, Laser ablation

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Proceedings Article | 21 February 2011 Paper

Laser modification and characterization of Li-Mn-O thin film cathodes for lithium-ion batteries

J. Pröll, R. Kohler, C. Adelhelm, M. Bruns, M. Torge, S. Heißler, M. Przybylski, C. Ziebert, W. Pfleging

Proceedings Volume 7921, 79210Q (2011) https://doi.org/10.1117/12.873700

KEYWORDS: Thin films, Lithium, Manganese, Annealing, Spinel, Laser ablation, Scanning electron microscopy, Oxygen, Crystals, X-ray diffraction

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Proceedings Article | 21 February 2011 Paper

Laser processing of SnO[sub]2[/sub] electrode materials for manufacturing of 3D micro-batteries

R. Kohler, J. Proell, S. Ulrich, M. Przybylski, W. Pfleging

Proceedings Volume 7921, 79210P (2011) https://doi.org/10.1117/12.873686

KEYWORDS: Thin films, Laser ablation, Electrodes, Lithium, Sputter deposition, Manufacturing, Crystals, Thin film deposition, Laser processing, X-ray diffraction

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Proceedings Article | 23 February 2010 Paper

Laser annealing of textured thin film cathode material for lithium ion batteries

R. Kohler, M. Bruns, P. Smyrek, S. Ulrich, M. Przybylski, W. Pfleging

Proceedings Volume 7585, 75850O (2010) https://doi.org/10.1117/12.841259

KEYWORDS: Thin films, Annealing, Lithium, Laser processing, Pulsed laser operation, Raman spectroscopy, Laser ablation, Diffusion, Electrodes, Crystals

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Proceedings Article | 25 February 2009 Paper

Laser-assisted structuring and modification of LiCoO2 thin films

R. Kohler, J. Proell, S. Ulrich, V. Trouillet, S. Indris, M. Przybylski, W. Pfleging

Proceedings Volume 7202, 720207 (2009) https://doi.org/10.1117/12.809164

KEYWORDS: Thin films, Annealing, Laser ablation, Laser processing, Lithium, Pulsed laser operation, Raman spectroscopy, Excimer lasers, Helium, Argon

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Proceedings Article | 23 February 2008 Paper

Patterning of polystyrene by UV-laser radiation for the fabrication of devices for patch clamping

W. Pfleging, M. Bruns, M. Przybylski, A. Welle, S. Wilson

Proceedings Volume 6880, 68800D (2008) https://doi.org/10.1117/12.763149

KEYWORDS: Pulsed laser operation, Polymers, Laser processing, Laser ablation, Laser drilling, Optical lithography, Oxygen, Surface roughness, Laser damage threshold, Adsorption

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Two types of laser patterning are of interest for application in microsystem technology: direct ablation of polymer material for the generation of two or three dimensional shapes such as microfluidic channels, curved shapes or micro-holes and alternatively photo-induced change of chemical or physical properties. An appropriate choice of laser and process parameters enables new approaches for the fabrication of lab-on-chip devices with integrated functionalities. We will present our current research results in laser-assisted ablation and modification of polystyrene (PS) with respect to the fabrication of polymer devices for high throughput planar patch clamping. Patch clamping is a highly sensitive technique used to measure the electrical activity of a cell. It is used in applications which include drug screening where there is demand for high throughput systems (HTS). While there are a few commercially available HTS patch clamping systems on the market using traditional patch clamping materials, there are no systems on the market using novel materials, or for dealing with cell networks - a physiologically important consideration for the developing fields of tissue engineering and understanding cell to cell interactions. This paper presents potential design approaches and processes for producing a polymer based automated patch clamping system. For this purpose laser micro-drilling of PS and subsequent surface functionalization was investigated as function of laser and process parameters. A high power ArF-excimer laser radiation source with pulse length of 20 ns (repetition rate up to 40 Hz) as well as high repetition ArF- and KrF-excimer laser sources with pulse lengths of 4-6 ns (repetition rates up to 500 Hz) were used in order to study the influence of laser pulse length on laser drilling and laser-induced surface modification. Micro-drilling of PS with diameters down to 1.5 μm were demonstrated. Furthermore the localized formation of chemical structures suitable for improved adhesion of single cells and cell networks was achieved on PS surfaces. A photolytic activation of specific areas of the polymer surface and subsequent oxidization in oxygen or ambient air leads to a chemically modified polymer surface bearing carboxylic acid groups well-suited for controlled competitive protein adsorption or protein immobilization. Finally, distinct areas for cell growth and adhesion are obtained. The combination of laser ablation and modification will be discussed for the laser-assisted fabrication of polymer devices for patch clamping.

Proceedings Article | 23 February 2006 Paper

Excimer laser material processing: state-of-the-art and new approaches in microsystem technology

W. Pfleging, M. Przybylski, H. Brückner

Proceedings Volume 6107, 61070G (2006) https://doi.org/10.1117/12.647425

KEYWORDS: Waveguides, Laser ablation, Excimer lasers, Pulsed laser operation, Polymers, Polymethylmethacrylate, Laser processing, Laser cutting, Refractive index, Absorption

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Proceedings Article | 26 May 1997 Paper

Short-pulse excimer laser performances and its applications: I. ophthamology

Marius Przybylski, Gabriel Simon

Proceedings Volume 2971, (1997) https://doi.org/10.1117/12.275097

KEYWORDS: Excimer lasers, Laser ablation, Surface plasmons, Cornea, Pulsed laser operation, Laser development, Laser therapeutics, Gas lasers, Laser applications, Surgery

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Showing 5 of 9 publications

Conference Committee Involvement (7)

Laser-based Micro- and Nanopackaging and Assembly VII

5 February 2013 | San Francisco, California, United States

Laser-based Micro- and Nanopackaging and Assembly VI

25 January 2012 | San Francisco, California, United States

Laser-based Micro- and Nanopackaging and Assembly V

26 January 2011 | San Francisco, California, United States

Laser-based Micro- and Nanopackaging and Assembly IV

27 January 2010 | San Francisco, California, United States

Laser-based Micro- and Nanopackaging and Assembly III

28 January 2009 | San Jose, California, United States

Showing 5 of 7 Conference Committees

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