Dr. Mariusz Martyniuk
at Univ of Western Australia
SPIE Involvement:
Author
Publications (5)

PROCEEDINGS ARTICLE | June 25, 2014
Proc. SPIE. 9083, Micro- and Nanotechnology Sensors, Systems, and Applications VI
KEYWORDS: Microelectromechanical systems, Gas sensors, Modulation, Waveguides, Sensors, Silicon, Interferometry, Optical resonators, Chemical analysis, Laser optics

PROCEEDINGS ARTICLE | December 7, 2013
Proc. SPIE. 8923, Micro/Nano Materials, Devices, and Systems
KEYWORDS: Thermography, Thin films, Calibration, Gallium arsenide, Silicon, Profilometers, Diodes, Plasma enhanced chemical vapor deposition, Cryogenics, Temperature metrology

PROCEEDINGS ARTICLE | May 21, 2011
Proc. SPIE. 8012, Infrared Technology and Applications XXXVII
KEYWORDS: Microelectromechanical systems, Infrared detectors, Actuators, Gold, Short wave infrared radiation, Optical filters, Mirrors, Germanium, Silicon, Infrared radiation

PROCEEDINGS ARTICLE | May 19, 2005
Proc. SPIE. 5798, Spaceborne Sensors II
KEYWORDS: Microelectromechanical systems, Thin films, Diamond, Microsystems, Silicon, Reliability, Control systems, Silicon films, Plasma enhanced chemical vapor deposition, Thin film deposition

PROCEEDINGS ARTICLE | April 2, 2004
Proc. SPIE. 5276, Device and Process Technologies for MEMS, Microelectronics, and Photonics III
KEYWORDS: Thin films, Mercury cadmium telluride, Particles, Silicon, Diagnostics, Silicon films, Plasma enhanced chemical vapor deposition, Thin film deposition, Thin film diagnostics, Temperature metrology

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