Marjorie Cheng
at Nova Measuring Instruments Inc
SPIE Involvement:
Publications (4)

Proceedings Article | 10 April 2024 Presentation + Paper
Proceedings Volume 12955, 129551O (2024)
KEYWORDS: Semiconducting wafers, Wafer level optics, Metrology, Silicon, Reactive ion etching, Reflection, Interferometry, Dielectrics, Polarization, Semiconductor manufacturing

Proceedings Article | 27 April 2023 Presentation + Paper
Stefan Schoeche, Daniel Schmidt, Marjorie Cheng, Aron Cepler, Abraham Arceo de la Pena, Jennifer Oakley
Proceedings Volume 12496, 124960D (2023)
KEYWORDS: Annealing, Raman spectroscopy, Semiconducting wafers, Silicon, Metals, Copper, Oxides, Chemical mechanical planarization, Reactive ion etching, Phonons

Proceedings Article | 4 May 2020 Presentation + Paper
Proceedings Volume 11325, 113251I (2020)
KEYWORDS: Scatterometry, Machine learning, Semiconducting wafers, Critical dimension metrology, Etching, Photoresist materials, Lithography, Metrology, Scatter measurement, Data modeling

Proceedings Article | 28 March 2017 Presentation + Paper
Padraig Timoney, Alok Vaid, Byeong Cheol Kang, Haibo Liu, Paul Isbester, Marjorie Cheng, Susan Ng-Emans, Naren Yellai, Matt Sendelbach, Roy Koret, Oram Gedalia
Proceedings Volume 10145, 1014506 (2017)
KEYWORDS: Scatterometry, Back end of line, Metrology, 3D metrology, 3D modeling, Dielectrics, Copper, Process control, Etching, Semiconducting wafers, Photomasks

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