CONFERENCE PROCEEDINGS
Advanced Search
Mark Babasa
at Northrop Grumman Corp
SPIE Involvement:
Author
Publications (1)
Proceedings Article | 11 March 2002 Paper
Integrated method of mask data checking and inspection data prep for manufacturable mask inspection: inspection rule violations
Joan McCall, Vinod Reddy, Hyung Kim, Mark Babasa
Proceedings Volume 4562, (2002) https://doi.org/10.1117/12.458288
KEYWORDS: Inspection, Photomasks, Optical proximity correction, Dysprosium, Manufacturing, Opacity, Databases, Semiconducting wafers, Communication engineering, Product engineering
SIGN IN TO:
  • View contact details
UPDATE YOUR PROFILE
Is this your profile? Update it now.
Sign into your SPIE.org account
Don’t have a profile and want one?
Create an account on SPIE.org
Advertisement
Advertisement
Back to Top