Mark A. Beals
Associate Director at Massachusetts Institute of Technology
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 13 February 2008
Proc. SPIE. 6898, Silicon Photonics III
KEYWORDS: Oxides, Photonic devices, Waveguides, Sensors, Germanium, Silicon, Modulators, Silicon films, Signal processing, Plasma enhanced chemical vapor deposition

Proceedings Article | 13 February 2008
Proc. SPIE. 6898, Silicon Photonics III
KEYWORDS: Modulation, Resonators, Waveguides, Polarization, Silicon, Modulators, Signal processing, Analog electronics, Electro optics, Electrooptic modulators

Proceedings Article | 9 February 2007
Proc. SPIE. 6477, Silicon Photonics II
KEYWORDS: Photodetectors, Optical filters, Resonators, Waveguides, Sensors, Silicon, Modulators, Signal processing, Microwave radiation, Semiconducting wafers

Proceedings Article | 1 March 2006
Proc. SPIE. 6125, Silicon Photonics
KEYWORDS: Photodetectors, Optical filters, Waveguides, Sensors, Signal attenuation, Germanium, Silicon, Modulators, Signal processing, Integrated circuits

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