Dr. Mark Cheng Profile

Dr. Mark Cheng

at Hefei Univ of Technology

SPIE Involvement:

Author

Publications (6)

Proceedings Article | 10 February 2017 Paper

Research on optical measurement for additive manufacturing surfaces

Fang Cheng, Shao Wei Fu, Yong Shin Leong

Proceedings Volume 10250, 102501F (2017) https://doi.org/10.1117/12.2266653

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Proceedings Article | 16 November 2011 Paper

Design of an analogue contact probe for nano-coordinate measurement machines (CMM)

Kuang-Chao Fan, Rui-Jun Li, Sheng Tao, Jian-Zhao Qian, Qiang-Xian Huang, Fang Cheng

Proceedings Volume 8321, 832114 (2011) https://doi.org/10.1117/12.903980

KEYWORDS: Sensors, Mirrors, Michelson interferometers, Head, Digital video discs, Photodiodes, Optimization (mathematics), Interferometers, 3D metrology, Beam splitters

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Proceedings Article | 16 November 2011 Paper

High precision measurement system based on coplanar XY-stage

Jin-Wei Miao, Kuang-Chao Fan, Wei Gong, You-Liang Zhang, Fang Cheng

Proceedings Volume 8321, 832119 (2011) https://doi.org/10.1117/12.904072

KEYWORDS: Sensors, Precision measurement, Diffraction gratings, Ultrasonics, Interferometers, Motion measurement, Actuators, Error analysis, Motion controllers, Calibration

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Proceedings Article | 18 May 2009 Paper

New method on real-time signal correction and subdivision for grating-based nanometrology

Fang Cheng, Ye-Tai Fei, Kuang-Chao Fan

Proceedings Volume 7284, 728403 (2009) https://doi.org/10.1117/12.832061

KEYWORDS: Signal processing, Sensors, Interferometers, Diffraction gratings, Error analysis, Erbium, Optical encoders, Signal analyzers, Signal detection, Data acquisition

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Proceedings Article | 31 December 2008 Paper

A robust control scheme of nanopositioning driven by ultrasonic motor

Kuang-Chao Fan, Fang Cheng, Ye-tai Fei

Proceedings Volume 7130, 71301O (2008) https://doi.org/10.1117/12.819598

KEYWORDS: Control systems, Ultrasonics, Signal processing, Sensors, Diffraction gratings, Neural networks, Interferometers, Mechanics, Signal detection, Scanning probe lithography

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Proceedings Article | 13 October 2006 Paper

A linear diffraction grating interferometer with high accuracy

Kuang-Chao Fan, Yu-Sheng Liu, Ye-Jin Chen, Fang Cheng

Proceedings Volume 6280, 628008 (2006) https://doi.org/10.1117/12.715260

KEYWORDS: Diffraction gratings, Interferometers, Diffraction, Signal processing, Doppler effect, Beam splitters, Wave plates, Phase shift keying, Phase measurement, Environmental sensing

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Showing 5 of 6 publications

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