Mark E. Heaton
at Imperial College London
SPIE Involvement:
Conference Program Committee | Author
Publications (3)

PROCEEDINGS ARTICLE | June 8, 2005
Proc. SPIE. 5827, Opto-Ireland 2005: Photonic Engineering
KEYWORDS: Microelectromechanical systems, Nanotechnology, Microsystems, Sensors, Manufacturing, Physics, Biotechnology, Photonics, Information technology, Analytical research

PROCEEDINGS ARTICLE | June 2, 2005
Proc. SPIE. 5824, Opto-Ireland 2005: Nanotechnology and Nanophotonics
KEYWORDS: Microelectromechanical systems, Microscopes, Laser marking, Laser ablation, Profiling, Thermal effects, Photomasks, Excimer lasers, Micromachining, Pulsed laser operation

PROCEEDINGS ARTICLE | November 18, 2003
Proc. SPIE. 5063, Fourth International Symposium on Laser Precision Microfabrication
KEYWORDS: Lithography, Polymers, Ultraviolet radiation, Silicon, Scanning electron microscopy, Laser ablation, Profiling, Photomasks, Excimer lasers, Micromachining

Conference Committee Involvement (1)
Surface Engineering and Nanotechnology
6 April 2005 | Dublin, Ireland
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