Mark Herding
at Univ of Freiburg
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | August 16, 2004
Proc. SPIE. 5455, MEMS, MOEMS, and Micromachining
KEYWORDS: Optical fibers, Zemax, Switches, Switching, Waveguides, Etching, Electrodes, Chromium, Geometrical optics, Light

PROCEEDINGS ARTICLE | January 15, 2003
Proc. SPIE. 4979, Micromachining and Microfabrication Process Technology VIII
KEYWORDS: Etching, Metals, Silicon, Platinum, Semiconductor lasers, Laser ablation, Photomasks, Semiconducting wafers, Rapid manufacturing, Prototyping

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top