Dr. Mark Lu
Manager at GLOBALFOUNDRIES Singapore
SPIE Involvement:
Author
Area of Expertise:
Tapeout , Lithography , DFM , OPC
Publications (8)

Proceedings Article | 12 April 2013
Proc. SPIE. 8683, Optical Microlithography XXVI
KEYWORDS: Etching, Metals, Image processing, Image quality, Photomasks, Image enhancement, Optical proximity correction, Nanoimprint lithography, Semiconducting wafers, Resolution enhancement technologies

Proceedings Article | 8 November 2012
Proc. SPIE. 8522, Photomask Technology 2012
KEYWORDS: Optical lithography, Databases, Metals, Silicon, Manufacturing, Design for manufacturing, Photomasks, Resistors, Semiconducting wafers, Yield improvement

Proceedings Article | 21 November 2007
Proc. SPIE. 6827, Quantum Optics, Optical Data Storage, and Advanced Microlithography
KEYWORDS: Metrology, Data modeling, Calibration, Scanning electron microscopy, Time metrology, Optical proximity correction, Critical dimension metrology, Statistical modeling, Systems modeling, Model-based design

Proceedings Article | 14 November 2007
Proc. SPIE. 6730, Photomask Technology 2007
KEYWORDS: Metrology, Data modeling, Calibration, Databases, Manufacturing, Photomasks, Optical proximity correction, Critical dimension metrology, Semiconducting wafers, Performance modeling

Proceedings Article | 26 March 2007
Proc. SPIE. 6520, Optical Microlithography XX
KEYWORDS: Semiconductors, Lithography, Data modeling, Calibration, Computing systems, Distributed computing, Immersion lithography, Optimization (mathematics), Numerical stability, Process modeling

Showing 5 of 8 publications
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