Mark A. Schulze
at nLine Corp
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 15 July 2003
Proc. SPIE. 5041, Process and Materials Characterization and Diagnostics in IC Manufacturing
KEYWORDS: Image visualization, Holograms, Digital holography, Defect detection, Visualization, Inspection, Wavefronts, Scanning electron microscopy, Digital imaging, Semiconducting wafers

Proceedings Article | 12 July 2002
Proc. SPIE. 4692, Design, Process Integration, and Characterization for Microelectronics
KEYWORDS: Beam splitters, Holograms, Holography, Digital holography, Deep ultraviolet, Spatial frequencies, Cameras, Fourier transforms, Digital video recorders, Semiconducting wafers

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