Mark C. Simmons
Sr. Product Marketing Manager at ASML
SPIE Involvement:
Publications (14)

Proceedings Article | 22 April 2024 Poster + Paper
Proceedings Volume 12957, 129571M (2024)
KEYWORDS: Calibration, Optical proximity correction, Extreme ultraviolet, Data modeling, Education and training, Performance modeling, Advanced patterning, Metrology, Machine learning, Databases

Proceedings Article | 22 February 2021 Presentation + Paper
Proceedings Volume 11609, 1160916 (2021)
KEYWORDS: Stochastic processes, Pattern recognition, Semiconducting wafers, Wafer inspection, Inspection, Defect detection, Metrology, Failure analysis, Data modeling, Calibration

Proceedings Article | 22 February 2021 Poster + Paper
Proceedings Volume 11613, 116130Y (2021)
KEYWORDS: Calibration, Machine learning, Signal processing, Physics, Optical proximity correction, Metrology, Lithography, Computational lithography

Proceedings Article | 26 March 2019 Presentation + Paper
Young-Seok Kim, SeIl Lee, Zhenyu Hou, Yiqiong Zhao, Meng Liu, Yunan Zheng, Qian Zhao, Daekwon Kang, Lei Wang, Mark Simmons, Mu Feng, Jun Lang, Byoung-Il Choi, Gilbert Kim, Hakyong Sim, Jongcheon Park, Gyun Yoo, JeonKyu Lee, Sung-woo Ko, Jaeseung Choi, Cheolkyun Kim, Chanha Park
Proceedings Volume 10959, 1095913 (2019)
KEYWORDS: Calibration, Metrology, Optical proximity correction, Data modeling, Instrument modeling, Scanning electron microscopy, Time metrology, Neural networks, Semiconducting wafers

Proceedings Article | 18 March 2015 Paper
Travis Lewis, Vijay Veeraraghavan, Kenneth Jantzen, Stephen Kim, Minyoung Park, Gordon Russell, Mark Simmons
Proceedings Volume 9427, 942711 (2015)
KEYWORDS: Optical proximity correction, Photomasks, Manufacturing, Data processing, Front end of line, Back end of line, Visualization, Design for manufacturability, Integrated circuits, Semiconductors

Showing 5 of 14 publications
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