Mr. Mark A. Summers
at Univ of Alberta
SPIE Involvement:
Author
Publications (3)

SPIE Journal Paper | July 1, 2005
JM3 Vol. 4 Issue 03
KEYWORDS: Thin films, Silicon, Fabrication, Thin film deposition, Electron beam lithography, Crystals, Nanostructures, Silicon films, Nanolithography, Thin film growth

PROCEEDINGS ARTICLE | April 13, 2005
Proc. SPIE. 5733, Photonic Crystal Materials and Devices III
KEYWORDS: Thin films, Ellipsometry, Electron beam lithography, Multilayers, Data modeling, Silicon, Photonic crystals, Scanning electron microscopy, Silicon films, Refraction

PROCEEDINGS ARTICLE | December 29, 2003
Proc. SPIE. 5347, Micromachining Technology for Micro-Optics and Nano-Optics II
KEYWORDS: Fabrication, Thin films, Nanostructures, Diamond, Silicon, Photonic crystals, Photoresist materials, Optical activity, Liquid crystals, Nanolithography

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