This course will provide attendees with a basic working knowledge of the applications of electron microscopy and surface analytical techniques in microelectronics. The course will focus on techniques currently available to industrial customers. It will highlight the kind of information that may be obtained from each technique, and its useful application in the microelectronics industry. While the course will be specifically tailored for the microelectronics industry, it will also be useful to anyone interested in developing a working knowledge of the kind of information that electron microscopy and surface analytical techniques can deliver.