Dr. Mark A. van de Kerkhof
Director EUV Research at ASML Netherlands BV
SPIE Involvement:
Conference Program Committee | Author
Publications (46)

Proceedings Article | 10 April 2024 Presentation + Paper
Proceedings Volume 12953, 129530E (2024) https://doi.org/10.1117/12.3009896
KEYWORDS: Particles, Plasma, Electrons, Adhesion, Scanners, Hydrogen, Extreme ultraviolet lithography, Ions, Stochastic processes, Particle contamination

Proceedings Article | 10 April 2024 Presentation + Paper
Proceedings Volume 12953, 1295302 (2024) https://doi.org/10.1117/12.3009996
KEYWORDS: Photomasks, Light sources and illumination, Source mask optimization, Lithography, Near field, Diffraction

Proceedings Article | 9 April 2024 Presentation + Paper
Proceedings Volume 12956, 129560I (2024) https://doi.org/10.1117/12.3011818
KEYWORDS: Extreme ultraviolet lithography, Extreme ultraviolet, Optical lithography, Photons, Electrons, 2D materials, Field effect transistors, Direct write lithography, Advanced patterning

Proceedings Article | 21 November 2023 Presentation + Paper
Proceedings Volume 12750, 1275006 (2023) https://doi.org/10.1117/12.2685543
KEYWORDS: Semiconducting wafers, Stochastic processes, Nanoimprint lithography, Printing, Line width roughness, Simulations, Optical lithography, Extreme ultraviolet lithography, Scanning electron microscopy, Extreme ultraviolet

Proceedings Article | 6 June 2023 Presentation + Paper
Proceedings Volume 12578, 1257805 (2023) https://doi.org/10.1117/12.2665735
KEYWORDS: Pellicles, Extreme ultraviolet, Optical components, Hydrogen, Semiconducting wafers, Lithography, Mirrors, Reticles, Carbon, Scanners

Showing 5 of 46 publications
Conference Committee Involvement (6)
Novel Patterning Technologies 2025
23 February 2025 | San Jose, California, United States
International Conference on Extreme Ultraviolet Lithography 2024
29 September 2024 | Monterey, California, United States
Novel Patterning Technologies 2024
26 February 2024 | San Jose, California, United States
International Conference on Extreme Ultraviolet Lithography 2023
2 October 2023 | Monterey, California, United States
Novel Patterning Technologies 2023
27 February 2023 | San Jose, California, United States
Showing 5 of 6 Conference Committees
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