Dr. Marko Vogler
at micro resist technology GmbH
SPIE Involvement:
Author
Publications (8)

PROCEEDINGS ARTICLE | April 3, 2015
Proc. SPIE. 9368, Optical Interconnects XV
KEYWORDS: Optical components, Lithography, Waveguides, Polymers, Ultraviolet radiation, Manufacturing, Microlens, Nanoimprint lithography, Optical interconnects, Optics manufacturing

SPIE Journal Paper | October 21, 2014
JM3 Vol. 13 Issue 04
KEYWORDS: Nanoimprint lithography, Etching, Silicon, Dry etching, Polymers, Photoresist processing, Nickel, Inkjet technology, Nanostructures, Reactive ion etching

SPIE Journal Paper | September 5, 2014
JM3 Vol. 13 Issue 03
KEYWORDS: Nanoimprint lithography, Metals, Multilayers, Etching, Polymethylmethacrylate, Optical lithography, Plasma, Ultraviolet radiation, Silicon films, Scanning electron microscopy

PROCEEDINGS ARTICLE | March 28, 2014
Proc. SPIE. 9049, Alternative Lithographic Technologies VI
KEYWORDS: Nanostructures, Refractive index, Etching, Dry etching, Silicon, Surface roughness, Nanoimprint lithography, Photoresist processing, Semiconducting wafers, Positron emission tomography

PROCEEDINGS ARTICLE | March 7, 2014
Proc. SPIE. 8974, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VII
KEYWORDS: Lithography, Refractive index, Optical lithography, Carbon dioxide, Polymers, Ultraviolet radiation, Transmittance, Nanofabrication, Optics manufacturing, UV optics

PROCEEDINGS ARTICLE | May 2, 2008
Proc. SPIE. 6792, 24th European Mask and Lithography Conference
KEYWORDS: Lithography, Transparency, Quartz, Polymers, Glasses, Ultraviolet radiation, Silicon, Coating, Sol-gels, Nanoimprint lithography

Showing 5 of 8 publications
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