Dr. Markus Bender
Sr. Innovation Engineer at Advanced Mask Technology Ctr GmbH Co KG
SPIE Involvement:
Author
Publications (11)

Proceedings Article | 27 June 2019 Paper
Proc. SPIE. 11178, Photomask Japan 2019: XXVI Symposium on Photomask and Next-Generation Lithography Mask Technology
KEYWORDS: Extreme ultraviolet lithography, Photomasks, Extreme ultraviolet, Scanners, Reflectivity, Oxidation, Ruthenium

Proceedings Article | 1 May 2019 Presentation + Paper
Proc. SPIE. 10957, Extreme Ultraviolet (EUV) Lithography X
KEYWORDS: Photomasks, Absorption, Reticles, Extreme ultraviolet lithography, Tantalum, Diffraction, Etching, Refractive index, Scanners, Distortion

Proceedings Article | 26 March 2019 Presentation + Paper
Proc. SPIE. 10957, Extreme Ultraviolet (EUV) Lithography X
KEYWORDS: Extreme ultraviolet, Photomasks, Metrology, Electron beam lithography, Reticles

Proceedings Article | 2 August 2018 Presentation + Paper
Proc. SPIE. 10585, Metrology, Inspection, and Process Control for Microlithography XXXII
KEYWORDS: Metrology, Extreme ultraviolet, Photomasks, Semiconducting wafers, Signal processing, Transmission electron microscopy, Atomic force microscopy, Etching

Proceedings Article | 13 July 2017 Paper
Proc. SPIE. 10454, Photomask Japan 2017: XXIV Symposium on Photomask and Next-Generation Lithography Mask Technology
KEYWORDS: Photomasks, Mirrors, Manufacturing, Optics manufacturing, Critical dimension metrology, Lithography, EUV optics, Etching, Ruthenium, Extreme ultraviolet

Showing 5 of 11 publications
Conference Committee Involvement (7)
Extreme Ultraviolet (EUV) Lithography IX
26 February 2018 | San Jose, California, United States
Extreme Ultraviolet (EUV) Lithography VIII
27 February 2017 | San Jose, California, United States
Extreme Ultraviolet (EUV) Lithography VII
22 February 2016 | San Jose, California, United States
Extreme Ultraviolet (EUV) Lithography VI
23 February 2015 | San Jose, California, United States
Extreme Ultraviolet (EUV) Lithography V
24 February 2014 | San Jose, California, United States
Showing 5 of 7 Conference Committees
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