Dr. Markus Wimplinger
Director of Technology for North America at EV Group
SPIE Involvement:
Author
Publications (5)

PROCEEDINGS ARTICLE | March 21, 2017
Proc. SPIE. 10144, Emerging Patterning Technologies
KEYWORDS: Lithography, Metrology, Calibration, Etching, Silicon, Manufacturing, Scanning electron microscopy, High volume manufacturing, Nanoimprint lithography, Critical dimension metrology, Semiconducting wafers, Standards development

PROCEEDINGS ARTICLE | October 20, 2016
Proc. SPIE. 10032, 32nd European Mask and Lithography Conference
KEYWORDS: Metrology, Polymers, Ultraviolet radiation, Silicon, Manufacturing, Scanning electron microscopy, High volume manufacturing, Nanoimprint lithography, Critical dimension metrology, Semiconducting wafers

PROCEEDINGS ARTICLE | March 18, 2009
Proc. SPIE. 7271, Alternative Lithographic Technologies
KEYWORDS: Lithography, Quartz, Polymers, Glasses, Ultraviolet radiation, Silicon, Materials processing, Manufacturing, Nanoimprint lithography, Semiconducting wafers

PROCEEDINGS ARTICLE | March 29, 2004
Proc. SPIE. 5275, BioMEMS and Nanotechnology
KEYWORDS: Lithography, BioMEMS, Polymers, Glasses, Nickel, Silicon, Printing, Nanoimprint lithography, Nanofabrication, Positron emission tomography

PROCEEDINGS ARTICLE | November 10, 2003
Proc. SPIE. 5177, Gradient Index, Miniature, and Diffractive Optical Systems III
KEYWORDS: Microelectromechanical systems, Optical components, Lithography, Silicon, Coating, Sapphire, Semiconducting wafers, Adhesives, Compound semiconductors, Wafer bonding

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