Dr. Markus Wimplinger
Director of Technology for North America at EV Group
SPIE Involvement:
Publications (7)

Proceedings Article | 9 April 2024 Presentation + Paper
Proceedings Volume 12956, 1295606 (2024) https://doi.org/10.1117/12.3010477
KEYWORDS: Wafer bonding, Semiconducting wafers, Distortion, Scanners, Silicon, Optical alignment, Deformation, Adhesion, Etching, Metrology

Proceedings Article | 27 April 2023 Poster + Paper
Proceedings Volume 12496, 124962C (2023) https://doi.org/10.1117/12.2657422
KEYWORDS: Wafer bonding, Semiconducting wafers, Scanners, Silicon, Distortion, Optical alignment, Transistors, Oxides, Crystals, Etching

Proceedings Article | 21 March 2017 Paper
H. Teyssedre, S. Landis, P. Brianceau, M. Mayr, C. Thanner, M. Laure, W. Zorbach, M. Eibelhuber, L. Pain, M. Chouiki, M. Wimplinger
Proceedings Volume 10144, 101440V (2017) https://doi.org/10.1117/12.2260002
KEYWORDS: Semiconducting wafers, Nanoimprint lithography, Manufacturing, Critical dimension metrology, Lithography, High volume manufacturing, Calibration, Standards development, Etching, Silicon, Metrology, Scanning electron microscopy

Proceedings Article | 20 October 2016 Paper
H. Teyssedre, S. Landis, C. Thanner, V. Schauer, M. Laure, W. Zorbach, L. Pain, S. Bos, M. Eibelhuber, M. Wimplinger
Proceedings Volume 10032, 100320M (2016) https://doi.org/10.1117/12.2250194
KEYWORDS: High volume manufacturing, Nanoimprint lithography, Semiconducting wafers, Critical dimension metrology, Silicon, Ultraviolet radiation, Polymers, Manufacturing, Metrology, Scanning electron microscopy

Proceedings Article | 18 March 2009 Paper
R. Miller, T. Glinsner, G. Kreindl, P. Lindner, M. Wimplinger
Proceedings Volume 7271, 72712J (2009) https://doi.org/10.1117/12.814102
KEYWORDS: Silicon, Materials processing, Polymers, Semiconducting wafers, Nanoimprint lithography, Lithography, Glasses, Ultraviolet radiation, Quartz, Manufacturing

Showing 5 of 7 publications
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