Marshall Overcast
Strategic Equipment & Process Owner at IM Flash Technologies LLC
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 13 March 2018
Proc. SPIE. 10585, Metrology, Inspection, and Process Control for Microlithography XXXII
KEYWORDS: Semiconductors, Lithography, Metrology, Etching, Error analysis, Data processing, Machine learning, Optical alignment, Semiconducting wafers, Overlay metrology

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