Marten Oldsen
at Fraunhofer Institut fur Siliziumtechnologie
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 26 February 2008
Proc. SPIE. 6882, Micromachining and Microfabrication Process Technology XIII
KEYWORDS: Gold, Oxides, Mirrors, Glasses, Scanners, Silicon, Micromirrors, Optical resolution, Semiconducting wafers, Wafer bonding

Proceedings Article | 21 February 2008
Proc. SPIE. 6887, MOEMS and Miniaturized Systems VII
KEYWORDS: Microelectromechanical systems, Packaging, Mirrors, Sensors, Scanners, Silicon, Micromirrors, Raster graphics, Laser based displays, Semiconducting wafers

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