Dr. Martin F. Fay
at Zygo Corporation
SPIE Involvement:
Author
Publications (5)

SPIE Journal Paper | May 22, 2017
OE Vol. 56 Issue 11
KEYWORDS: Model-based design, Interferometry, Metrology, Calibration, Refractive index, Oxides, Silicon, Silicon films, Gold, Systems modeling

PROCEEDINGS ARTICLE | August 28, 2016
Proc. SPIE. 9960, Interferometry XVIII
KEYWORDS: Gold, Oxides, Refractive index, Metrology, Calibration, Silicon, Interferometry, Zoom lenses, Model-based design, Reverse modeling

PROCEEDINGS ARTICLE | August 18, 2014
Proc. SPIE. 9203, Interferometry XVII: Techniques and Analysis
KEYWORDS: Microscopes, Optical filters, Light sources, Metrology, Cameras, Sensors, Image resolution, Interferometry, Data acquisition, Color imaging

PROCEEDINGS ARTICLE | March 24, 2009
Proc. SPIE. 7272, Metrology, Inspection, and Process Control for Microlithography XXIII
KEYWORDS: Oxides, Microscopes, Metrology, Data modeling, Polarization, Optical properties, Data storage, Reflectivity, 3D metrology, Semiconducting wafers

PROCEEDINGS ARTICLE | August 11, 2008
Proc. SPIE. 7064, Interferometry XIV: Applications
KEYWORDS: Thin films, Multilayers, Optical properties, Interferometers, Microscopy, Silicon, Interferometry, 3D modeling, Profiling, 3D metrology

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