Martin Freitag
Customer Engagement Manager at Qoniac GmbH
SPIE Involvement:
Publications (4)

Proceedings Article | 10 April 2024 Poster + Paper
Yueh-Feng Lu, Chao-Jen Tsou, Onur Demirer, Holger Bald, Siegfried Hille, Meng-Syun Li, Martin Freitag, Clemens Utzny, Scott Eitapence, Boris Habets, Cheng-Shuai Li, Kao-Tsai Tsai
Proceedings Volume 12955, 1295524 (2024)
KEYWORDS: Optical alignment, Semiconducting wafers, Alignment modeling, Overlay metrology, Optical lithography, Scanners, Systems modeling, Performance modeling, Control systems, Computer simulations

Proceedings Article | 22 February 2021 Presentation + Paper
Jia Hung Chang, En Chuan Lio, Junjin Lin, Tang Chun Weng, Bill Lin, Patrick Lomtscher, Martin Freitag, Stefan Buhl, Hsiao Lin Hsu, Rex Liu
Proceedings Volume 11613, 116130K (2021)

Proceedings Article | 26 March 2019 Paper
Proceedings Volume 10959, 109592T (2019)
KEYWORDS: Semiconducting wafers, Optical alignment, Data modeling, Overlay metrology, Data corrections, Visualization, Lithography, Reticles, Optimization (mathematics)

Proceedings Article | 13 March 2018 Paper
Proceedings Volume 10585, 105851H (2018)
KEYWORDS: Overlay metrology, Etching, Lithography, Semiconducting wafers, Metrology, Critical dimension metrology, Molybdenum, Information operations, Optical lithography, Double patterning technology

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