Dr. Martin Glodde
Researcher at IBM Thomas J Watson Research Ctr
SPIE Involvement:
Author
Publications (15)

Proceedings Article | 17 May 2019 Presentation + Paper
Proc. SPIE. 11010, Chemical, Biological, Radiological, Nuclear, and Explosives (CBRNE) Sensing XX
KEYWORDS: Sensors, Waveguides, Photonic integrated circuits, Spectroscopy, Silicon, Semiconductor lasers, Silicon photonics, Integrated photonics, Sensor networks, Fabry–Perot interferometers

Proceedings Article | 4 March 2019 Paper
Proc. SPIE. 10923, Silicon Photonics XIV
KEYWORDS: Waveguides, Sensors, Methane, Silicon photonics, Silicon, Spectroscopy, Absorption, Photodetectors, Tunable lasers

Proceedings Article | 28 March 2018 Paper
Proc. SPIE. 10584, Novel Patterning Technologies 2018
KEYWORDS: Etching, Critical dimension metrology, Metals, Directed self assembly, Oxides, Back end of line, Dielectrics, Scanning electron microscopy, Tin, Lithography

Proceedings Article | 27 March 2017 Presentation + Paper
Proc. SPIE. 10146, Advances in Patterning Materials and Processes XXXIV
KEYWORDS: Reactive ion etching, Semiconducting wafers, Polymers, Carbon

Proceedings Article | 27 March 2017 Paper
Proc. SPIE. 10146, Advances in Patterning Materials and Processes XXXIV
KEYWORDS: Extreme ultraviolet, Etching, Image resolution, Line width roughness, Interfaces, Semiconducting wafers, Materials processing, Photoresist processing, Silicon, Head-mounted displays, Extreme ultraviolet lithography, Systems modeling, Oxides

Showing 5 of 15 publications
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