Dr. Martin Hagenbuechle
Staff Engineer
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 3 June 2002 Paper
Proc. SPIE. 4652, Optoelectronic Interconnects, Integrated Circuits, and Packaging
KEYWORDS: Microelectromechanical systems, Mirrors, Beam splitters, Custom fabrication, Glasses, Ultraviolet radiation, Optical fabrication, Collimators, Collimation, Optical alignment

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