Dr. Martin Hermann
at Carl Zeiss SMT GmbH
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 14 May 2019 Presentation
Proc. SPIE. 11035, Optics Damage and Materials Processing by EUV/X-ray Radiation VII
KEYWORDS: Optical filters, Signal attenuation, Metals, X-rays, Silicon, Laser ablation, Extreme ultraviolet, Aluminum, X-ray lasers, Free electron lasers

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