Martin Heusinger
at Friedrich-Schiller-Univ Jena
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 15 June 2018
Proc. SPIE. 10692, Optical Fabrication, Testing, and Metrology VI
KEYWORDS: Diffraction, Optical design, Scattering, Spectroscopy, Light scattering, Line edge roughness, Stray light, Diffraction gratings

Proceedings Article | 26 June 2017
Proc. SPIE. 10330, Modeling Aspects in Optical Metrology VI
KEYWORDS: Modeling, Refractive index, Finite-difference time-domain method, Deep ultraviolet, Polarization, Etching, Tungsten, Polarizers, Optical metrology, Ion beams, Line edge roughness, Polarization control

Proceedings Article | 14 March 2016
Proc. SPIE. 9759, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics IX
KEYWORDS: Electron beam lithography, Diffraction, Optical design, Electron beams, Astronomical spectrometers, Scattering, Sensors, Calibration, Spectroscopy, Spectrometers, Light scattering, Laser scattering, Optical testing, Stray light, Binary data, Neptunium, Diffraction gratings

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