Prof. Martin Hoffmann
Chair of Microsystems Techn at Ruhr-Univ Bochum
SPIE Involvement:
Conference Program Committee | Author
Publications (13)

Proceedings Article | 26 March 2019
Proc. SPIE. 10958, Novel Patterning Technologies for Semiconductors, MEMS/NEMS, and MOEMS 2019
KEYWORDS: Fabrication, Lithography, Nanostructures, Optical sensors, Sensors, Ultraviolet radiation, Silicon, Scanning electron microscopy, Nanoimprint lithography, Photoresist processing

Proceedings Article | 1 June 2015
Proc. SPIE. 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems
KEYWORDS: Actuators, Switching, Microsystems, Sensors, Video, Silicon, Resistance, Transducers, Microsensors, Binary data

Proceedings Article | 21 May 2015
Proc. SPIE. 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems
KEYWORDS: Microelectromechanical systems, Actuators, Confocal microscopy, Hyperspectral imaging, Microsystems, Imaging systems, Electrodes, Aluminum, Deep reactive ion etching, Charge-coupled devices

SPIE Journal Paper | 10 June 2013
JM3 Vol. 12 Issue 02
KEYWORDS: Aluminum nitride, Microopto electromechanical systems, Microlens, Lenses, Spherical lenses, Nitrogen, Semiconducting wafers, Manufacturing, Silicon, Solids

Proceedings Article | 13 March 2013
Proc. SPIE. 8616, MOEMS and Miniaturized Systems XII
KEYWORDS: Thin films, Refractive index, Silica, Waveguides, Scanners, Silicon, Silicon films, Collimation, Integrated optics, Waveguide modes

Showing 5 of 13 publications
Conference Committee Involvement (2)
Smart Sensors, Actuators, and MEMS VIII
8 May 2017 | Barcelona, Spain
Smart Sensors, Actuators, and MEMS VII
4 May 2015 | Barcelona, Spain
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