Prof. Martin Hoffmann
Chair of Microsystems Techn at Ruhr-Univ Bochum
SPIE Involvement:
Author
Publications (14)

Proceedings Article | 2 March 2020 Presentation + Paper
Proc. SPIE. 11279, Terahertz, RF, Millimeter, and Submillimeter-Wave Technology and Applications XIII
KEYWORDS: Microelectromechanical systems, Packaging, Gas sensors, Modulation, Silicon, Gases, Resistance, Platinum, Infrared spectroscopy, Black bodies, Infrared radiation, Photometry, Infrared technology, Infrared detection, Temperature metrology

Proceedings Article | 26 March 2019 Paper
Proc. SPIE. 10958, Novel Patterning Technologies for Semiconductors, MEMS/NEMS, and MOEMS 2019
KEYWORDS: Fabrication, Lithography, Nanostructures, Optical sensors, Sensors, Ultraviolet radiation, Silicon, Scanning electron microscopy, Nanoimprint lithography, Photoresist processing

Proceedings Article | 1 June 2015 Paper
Proc. SPIE. 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems
KEYWORDS: Actuators, Switching, Microsystems, Sensors, Video, Silicon, Resistance, Transducers, Microsensors, Binary data

Proceedings Article | 21 May 2015 Paper
Proc. SPIE. 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems
KEYWORDS: Microelectromechanical systems, Actuators, Confocal microscopy, Hyperspectral imaging, Microsystems, Imaging systems, Electrodes, Aluminum, Deep reactive ion etching, Charge-coupled devices

SPIE Journal Paper | 10 June 2013
JM3 Vol. 12 Issue 02
KEYWORDS: Aluminum nitride, Microopto electromechanical systems, Microlens, Lenses, Spherical lenses, Nitrogen, Semiconducting wafers, Manufacturing, Silicon, Solids

Showing 5 of 14 publications
Conference Committee Involvement (2)
Smart Sensors, Actuators, and MEMS VIII
8 May 2017 | Barcelona, Spain
Smart Sensors, Actuators, and MEMS VII
4 May 2015 | Barcelona, Spain
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