Dr. Martin Kreuzer Profile

Dr. Martin Kreuzer

PostDoc at Inst Catala de Nanociencia i Nanotecnologia

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Publications (2)

Proceedings Article | 24 September 2015 Paper

In-line metrology setup for periodic nanostructures based on sub-wavelength diffraction

Martin Kreuzer, Jordi Gomis Bresco, Marianna Sledzinska, Clivia Sotomayor Torres

Proceedings Volume 9628, 96281Q (2015) https://doi.org/10.1117/12.2191346

KEYWORDS: Diffraction gratings, Diffraction, Polymers, Metrology, Scanning electron microscopy, Electron beam lithography, Nanostructures, Optical design, Polymer thin films, Critical dimension metrology

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Proceedings Article | 19 March 2015 Paper

A diffractometer for quality control in nano fabrication processing based on subwavelength diffraction

Martin Kreuzer, Jordi Gomis Bresco, Marianna Sledzinska, Clivia Sotomayor Torres

Proceedings Volume 9424, 942426 (2015) https://doi.org/10.1117/12.2085924

KEYWORDS: Diffraction, Diffraction gratings, Polymers, Polymethylmethacrylate, Scanning electron microscopy, Silicon, Platinum, Nanofabrication, Scattering, Control systems

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