Dr. Martin Kreuzer
PostDoc at Inst Catala de Nanociencia i Nanotecnologia
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 24 September 2015
Proc. SPIE. 9628, Optical Systems Design 2015: Optical Fabrication, Testing, and Metrology V
KEYWORDS: Nanostructures, Electron beam lithography, Diffraction, Optical design, Metrology, Polymers, Scanning electron microscopy, Critical dimension metrology, Polymer thin films, Diffraction gratings

Proceedings Article | 19 March 2015
Proc. SPIE. 9424, Metrology, Inspection, and Process Control for Microlithography XXIX
KEYWORDS: Diffraction, Polymethylmethacrylate, Scattering, Polymers, Silicon, Control systems, Platinum, Scanning electron microscopy, Nanofabrication, Diffraction gratings

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top