Dr. Martin McCallum
Technical Marketing Manager at
SPIE Involvement:
Symposium Chair | Conference Program Committee | Author
Publications (40)

PROCEEDINGS ARTICLE | March 13, 2012
Proc. SPIE. 8326, Optical Microlithography XXV
KEYWORDS: Lithography, Optical lithography, Image processing, Scanners, Scanning electron microscopy, Signal processing, Optical alignment, Photoresist processing, Semiconducting wafers, System on a chip

PROCEEDINGS ARTICLE | March 23, 2011
Proc. SPIE. 7973, Optical Microlithography XXIV
KEYWORDS: Lithography, Optical lithography, Etching, Scanners, Double patterning technology, Optical alignment, Critical dimension metrology, Semiconducting wafers, Overlay metrology, Double positive medium

PROCEEDINGS ARTICLE | April 2, 2010
Proc. SPIE. 7638, Metrology, Inspection, and Process Control for Microlithography XXIV
KEYWORDS: Wafer-level optics, Optical lithography, Metals, Resistance, Inspection, Physics, Photomasks, Aluminum, Optical proximity correction, Semiconducting wafers

PROCEEDINGS ARTICLE | September 23, 2009
Proc. SPIE. 7488, Photomask Technology 2009
KEYWORDS: Wafer-level optics, Oxides, Resistance, Inspection, Physics, Scanning electron microscopy, Photomasks, Optical proximity correction, Resistors, Semiconducting wafers

PROCEEDINGS ARTICLE | May 27, 2009
Proc. SPIE. 7470, 25th European Mask and Lithography Conference
KEYWORDS: Lithography, Reticles, Scanners, Image registration, Pellicles, Photomasks, Double patterning technology, Optical alignment, Critical dimension metrology, Semiconducting wafers

PROCEEDINGS ARTICLE | May 6, 2009
Proc. SPIE. 7281, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Large Mirrors and Telescopes
KEYWORDS: Lithography, Optical lithography, Lithographic illumination, Deep ultraviolet, Imaging systems, Manufacturing, Photoresist materials, Photomasks, Semiconducting wafers, Resolution enhancement technologies

Showing 5 of 40 publications
Conference Committee Involvement (2)
Lithography for Semiconductor Manufacturing
19 May 1999 | Edinburgh, United Kingdom
Microelectronic Manufacturing Technologies
19 May 1999 | Edinburgh, United Kingdom
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