Dr. Martin Samayoa
at Samsung Austin Semiconductor
SPIE Involvement:
Publications (5)

Proceedings Article | 3 October 2018 Presentation + Paper
Davide Dattilo, Sebastian Dietze, Martin Samayoa, Uwe Dietze, Victoria Dahl, Zhenxing Han
Proceedings Volume 10810, 108100R (2018) https://doi.org/10.1117/12.2503937
KEYWORDS: Pellicles, Inspection, Scanning probe microscopy, Photomasks, Optical inspection, Reticles, Chemistry, Visualization, Polymers, Particles

Proceedings Article | 20 October 2016 Paper
Zhenxing Han, Berthold Ferstl, Günter Oetter, Uwe Dietze, Martin Samayoa, Davide Dattilo
Proceedings Volume 10032, 1003207 (2016) https://doi.org/10.1117/12.2248594
KEYWORDS: Particles, Cavitation, Acoustics, Acoustic cavitation, Photomasks, Photons, Chemistry, Transducers, Extreme ultraviolet, Sonoluminescence

Proceedings Article | 4 October 2016 Paper
Jyh-Wei Hsu, Martin Samayoa, Peter Dress, Uwe Dietze, Ai-Jay Ma, Chia-Shih Lin, Rick Lai, Peter Chang, Laurent Tuo
Proceedings Volume 9985, 998515 (2016) https://doi.org/10.1117/12.2241143
KEYWORDS: SRAF, Photomasks, Cavitation, Particles, Inspection, Glasses, Plasma, Mask cleaning, Acoustics, Oxygen

Proceedings Article | 19 March 2015 Paper
P. Hung, Thomas O'Loughlin, Aaron Lewis, Rimma Dechter, Martin Samayoa, Sarbajit Banerjee, Erin Wood, Angela R. Hight Walker
Proceedings Volume 9424, 94241S (2015) https://doi.org/10.1117/12.2175623
KEYWORDS: Raman spectroscopy, Gold, Silicon, Scanning electron microscopy, Metrology, Transmission electron microscopy, Etching, Atomic force microscopy, Particles, Spatial resolution

Proceedings Article | 17 April 2014 Paper
Abbas Rastegar, Martin Samayoa, Matthew House, Hüseyin Kurtuldu, Sang-Kee Eah, Lauren Morse, Jenah Harris-Jones
Proceedings Volume 9048, 90480P (2014) https://doi.org/10.1117/12.2048080
KEYWORDS: Particles, Atmospheric particles, Silica, Extreme ultraviolet, Semiconducting wafers, Transmission electron microscopy, Photomasks, Aerosols, Ions, Neodymium

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