Dr. Martin Samayoa
Jr. Director at SUSS MicroTec Inc
SPIE Involvement:
Author
Publications (5)

PROCEEDINGS ARTICLE | October 3, 2018
Proc. SPIE. 10810, Photomask Technology 2018
KEYWORDS: Pellicles, Inspection, Scanning probe microscopy, Photomasks, Optical inspection, Reticles, Chemistry, Visualization, Polymers, Particles

PROCEEDINGS ARTICLE | October 20, 2016
Proc. SPIE. 10032, 32nd European Mask and Lithography Conference
KEYWORDS: Particles, Cavitation, Acoustics, Acoustic cavitation, Photomasks, Photons, Chemistry, Transducers, Extreme ultraviolet, Sonoluminescence

PROCEEDINGS ARTICLE | October 4, 2016
Proc. SPIE. 9985, Photomask Technology 2016
KEYWORDS: SRAF, Photomasks, Cavitation, Particles, Inspection, Glasses, Plasma, Mask cleaning, Acoustics, Oxygen

PROCEEDINGS ARTICLE | March 19, 2015
Proc. SPIE. 9424, Metrology, Inspection, and Process Control for Microlithography XXIX
KEYWORDS: Raman spectroscopy, Gold, Silicon, Scanning electron microscopy, Metrology, Transmission electron microscopy, Etching, Atomic force microscopy, Particles, Spatial resolution

PROCEEDINGS ARTICLE | April 17, 2014
Proc. SPIE. 9048, Extreme Ultraviolet (EUV) Lithography V
KEYWORDS: Particles, Atmospheric particles, Silica, Extreme ultraviolet, Semiconducting wafers, Transmission electron microscopy, Photomasks, Aerosols, Ions, Neodymium

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