PROCEEDINGS ARTICLE | February 24, 2009
Proc. SPIE. 7201, Laser Applications in Microelectronic and Optoelectronic Manufacturing VII
KEYWORDS: Femtosecond phenomena, Multiphoton microscopy, Nanostructuring, Cameras, Laser applications, Image restoration, Diagnostics, Laser scanners, Software development, Nanoprocess
An integrated tool combining control and diagnostic for nanoprocessing of bio-compatible and biological materials and
also allowing multiphoton large area laser scanning microscopy has been developed. The device is based on an
customized inverted microscope integrating a motorized open x,y stage with a very high precision and repeatability, a
piezoelectric z axe. A strong development in hardware and software has been made for the control of the process.
Imaging of large area by images reconstruction using a high resolution CCD camera for the machining and perforation of
biological materials and non-biological materials on scales in the sub-micrometer range is possible. This tool can also be
used as a laser scanning microscope of a large area using a PMT detector. This multi-function compact device is of prime
interest and can be considered as a novel tool for nanoprocessing in material science, nanobiotechnology, nanomedicine.
Further progress in telecommunications, optics, electronics, biomaterials, medicine, and transport strongly depends on
the availability of reliable and rapid processing techniques. Laser-based micro-nano technology holds great promises and
the evolution will be dictated by the development of inexpensive yet precise processing tools that can develop and
structure materials with a high degree of controllability, accuracy, and reduced residual damage. Applications in
biomedicine include, for example, optoporation, cells nanodrilling, nanocutting transfection of cells, deactivation of cell
organelles or investigation of cell dynamics but also potentially useful in material science for the manufacture of
waveguides, gratings, micro fluidic devices, nanocontainers, data storage, nanolithography, nanomarking,...
