Martin T.K. Soh
at Univ of Western Australia
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | April 2, 2004
Proc. SPIE. 5276, Device and Process Technologies for MEMS, Microelectronics, and Photonics III
KEYWORDS: Microelectromechanical systems, Thermography, Thin films, Oscillators, Silicon, Chemical vapor deposition, Silicon films, Infrared radiation, Plasma, Absorption

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