Dr. Martin Y. Sohn
Physicist at National Institute of Standards and Technology
SPIE Involvement:
Author
Area of Expertise:
Optical microscopy , Photolithography , Optical system design , Optical metrology , Instrumentation , Holography
Publications (20)

PROCEEDINGS ARTICLE | March 19, 2018
Proc. SPIE. 10585, Metrology, Inspection, and Process Control for Microlithography XXXII
KEYWORDS: Semiconductors, Thin films, Metrology, Chemical species, Dielectrics, Optical testing, Scatterometry, Measurement devices, Scatter measurement, Electromagnetism

PROCEEDINGS ARTICLE | November 8, 2017
Proc. SPIE. 10451, Photomask Technology
KEYWORDS: Microscopes, Metrology, Polarization, Microscopy, Light scattering, Optical metrology, Objectives, Photomasks, Beam shaping, Illumination engineering

PROCEEDINGS ARTICLE | June 26, 2017
Proc. SPIE. 10330, Modeling Aspects in Optical Metrology VI
KEYWORDS: Semiconductors, Signal to noise ratio, Metrology, Finite-difference time-domain method, Optical lithography, Defect detection, Deep ultraviolet, Polarization, Scattering, Ultraviolet radiation, Light scattering, Inspection, Semiconducting wafers, Defect inspection

PROCEEDINGS ARTICLE | March 30, 2017
Proc. SPIE. 10145, Metrology, Inspection, and Process Control for Microlithography XXXI
KEYWORDS: Signal to noise ratio, Finite-difference time-domain method, Optical spheres, Defect detection, Polarization, Scattering, Silicon, Bridges, Extreme ultraviolet, Defect inspection

PROCEEDINGS ARTICLE | March 25, 2016
Proc. SPIE. 9778, Metrology, Inspection, and Process Control for Microlithography XXX
KEYWORDS: Semiconductors, Metrology, Data modeling, Polarization, Scattering, Microscopy, 3D modeling, Scatterometry, Critical dimension metrology, Model-based design

PROCEEDINGS ARTICLE | September 9, 2015
Proc. SPIE. 9556, Nanoengineering: Fabrication, Properties, Optics, and Devices XII
KEYWORDS: Microscopes, Surface plasmons, Scattering, Calibration, Light scattering, Image acquisition, Objectives, Excimer lasers, Charge-coupled devices, Diffraction gratings

Showing 5 of 20 publications
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