An investigation on short-wavelength ablation mechanism of poly(1,4-phenylene ether ether-sulfune) PPEESand poly (1-hexadecene-sulfone) PHDS (Figure 9-10) by EUV radiation is presented. The goal of this work is to evaluate the ablation behavior with respect to the influence of wavelength, fluence and quantum efficiency. Because there is no yet a general EUV ablation theory, data are analyzed in order to underline regularity of the process which can be used in future to detect the scaling laws of the process. The differences with longer wavelengths ablation and EUV one are pointed out and possible applications of EUV ablation are proposed.
We have developed a novel method for efficient structuring of the surface of materials by applying femtosecond near
infrared laser pulses simultaneously with a weak extreme ultraviolet beam, which leads to a very strong radiation-matter
interaction and brings a dramatic increase of the surface processing speed. We present our recent experimental results on
surface nanostructuring of thin films of amorphous carbon and polymethyl methacrylate deposited on bulk substrates and
discuss the underlying physical mechanisms. In the case of amorphous carbon, large areas of laser-induced periodic
surface structures with a spatial period of 550 nm were created, having their origin in laser-induced convective currents.
Our method provides a powerful tool for fast modification of tribological properties of the irradiated sample.