Martyn Coogans
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 22 February 2021 Presentation + Paper
Ye Feng, Joseph Ervin, Anthony Woo, Yang Lu, Martyn Coogans, Ivan Chakarov, David Fried
Proceedings Volume 11614, 116140I (2021) https://doi.org/10.1117/12.2582789
KEYWORDS: Process modeling, Calibration, Gallium arsenide, Instrument modeling, 3D modeling, Fin field effect transistors, Transmission electron microscopy, Silicon, Scatterometry, Manufacturing

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