Prof. Mary Ann J. Hockey
Applications Engineering Manager at Brewer Science Inc
SPIE Involvement:
Author
Publications (8)

PROCEEDINGS ARTICLE | March 20, 2018
Proc. SPIE. 10589, Advanced Etch Technology for Nanopatterning VII
KEYWORDS: Etching, Nitrogen, Chemistry, Oxygen, Directed self assembly, Plasma etching, Carbon monoxide, Plasma

PROCEEDINGS ARTICLE | March 19, 2018
Proc. SPIE. 10584, Novel Patterning Technologies 2018
KEYWORDS: Lithography, Etching, Dry etching, Annealing, Chemistry, Manufacturing, Photomasks, Directed self assembly, Wet etching, Temperature metrology

PROCEEDINGS ARTICLE | March 13, 2018
Proc. SPIE. 10586, Advances in Patterning Materials and Processes XXXV
KEYWORDS: Polymers, Annealing, Directed self assembly

PROCEEDINGS ARTICLE | March 27, 2017
Proc. SPIE. 10146, Advances in Patterning Materials and Processes XXXIV
KEYWORDS: Polymers, Glasses, Annealing, Scanning electron microscopy, Directed self assembly, Wet etching

PROCEEDINGS ARTICLE | March 28, 2014
Proc. SPIE. 9049, Alternative Lithographic Technologies VI
KEYWORDS: Polymethylmethacrylate, Etching, Annealing, Resistance, Scanning electron microscopy, Photoresist materials, Directed self assembly, Plasma etching, Picosecond phenomena, System on a chip

PROCEEDINGS ARTICLE | March 26, 2013
Proc. SPIE. 8680, Alternative Lithographic Technologies V
KEYWORDS: Lithography, Optical lithography, Polymethylmethacrylate, Reflection, Etching, Photoresist materials, Directed self assembly, Critical dimension metrology, System on a chip, Polonium

Showing 5 of 8 publications
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