Dr. Mary Ann Maher
at SoftMEMS
SPIE Involvement:
Conference Chair | Conference Program Committee | Editor | Author
Publications (17)

SPIE Conference Volume | March 25, 2014

SPIE Journal Paper | December 16, 2013
JM3 Vol. 12 Issue 04
KEYWORDS: Microelectromechanical systems, Integrated optics, Active optics, Photonic devices, Sensors, Actuators, Biomedical optics, Metamaterials, Terahertz radiation, Quantum dots

SPIE Conference Volume | March 26, 2013

SPIE Conference Volume | March 19, 2012

SPIE Conference Volume | February 10, 2011

SPIE Conference Volume | February 10, 2010

Showing 5 of 17 publications
Conference Committee Involvement (13)
Micromachining and Microfabrication Process Technology XIX
5 February 2014 | San Francisco, California, United States
Micromachining and Microfabrication Process Technology XVIII
5 February 2013 | San Francisco, California, United States
Micromachining and Microfabrication Process Technology XVII
25 January 2012 | San Francisco, California, United States
Micromachining and Microfabrication Process Technology XVI
25 January 2011 | San Francisco, California, United States
Micromachining and Microfabrication Process Technology XV
26 January 2010 | San Francisco, California, United States
Showing 5 of 13 published special sections
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