Mary Kate Boggiano
Graduate Research Assistant at Univ of N Carolina/Chapel Hill
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 4 May 2005
Proc. SPIE. 5753, Advances in Resist Technology and Processing XXII
KEYWORDS: Lithography, Optical lithography, Imaging systems, Polymers, Photoresist materials, Polymerization, Plasma etching, Fluorine, Semiconducting wafers, Photoresist developing

Proceedings Article | 14 May 2004
Proc. SPIE. 5376, Advances in Resist Technology and Processing XXI
KEYWORDS: Lithography, Optical lithography, Etching, Polymers, Glasses, Resistance, Photoresist materials, Polymerization, Absorbance, Fluorine

Proceedings Article | 12 June 2003
Proc. SPIE. 5039, Advances in Resist Technology and Processing XX
KEYWORDS: Lithography, Optical lithography, Carbon dioxide, Polymers, Glasses, Photoresist materials, Polymerization, Absorbance, Semiconducting wafers, Liquids

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