Dr. Mary J. Li Profile

Dr. Mary J. Li

Engineer at NASA Goddard Space Flight Ctr

SPIE Involvement:

Author

Publications (33)

Proceedings Article | 16 December 2020 Paper

Programmable microshutter selection masks in application to UV spectroscopy

A. S. Kutyrev, M. Greenhouse, Mary J. Li, K. Kim, R. Brekosky, S. McCandliss, N. Costen, Frederick Wang

Proceedings Volume 11443, 114431D (2020) https://doi.org/10.1117/12.2563193

KEYWORDS: James Webb Space Telescope, Camera shutters, Space operations, Astronomical imaging, Space telescopes, Telescopes, Spectroscopy, Spectrographs, Staring arrays, Prototyping

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Proceedings Article | 9 September 2019 Presentation

Programmable microshutter selection masks in application to UV spectroscopy (Conference Presentation)

Alexander Kutyrev, Mathew Greenhouse, Mary Li, Samuel Moseley, Regis Brekosky, Stephan McCandliss, Lance Oh, Kyowon Kim

Proceedings Volume 11118, 1111809 (2019) https://doi.org/10.1117/12.2529824

KEYWORDS: Ultraviolet radiation, Spectroscopes, James Webb Space Telescope, Spectroscopy, Microelectromechanical systems, Astronomical imaging, Reliability, Silicon, Electrodes, Near infrared

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Proceedings Article | 29 August 2017 Presentation + Paper

Scattered light characterization of FORTIS

Stephan McCandliss, Anna Carter, Keith Redwine, Stephane Teste, Russell Pelton, John Hagopian, Alexander Kutyrev, Mary Li, S. Harvey Moseley

Proceedings Volume 10397, 1039718 (2017) https://doi.org/10.1117/12.2274282

KEYWORDS: Imaging spectroscopy, Light scattering, Collimators, 3D modeling, Carbon nanotubes, Carbon, Foam, Device simulation, Space telescopes, Telescopes

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SPIE Journal Paper | 7 April 2017

James Webb Space Telescope microshutter arrays and beyond

Mary Li, Ari-David Brown, Devin Burns, Daniel P. Kelly, Kyowon Kim, Alexander Kutyrev, Samuel Moseley, Vilem Mikula, Lance Oh

JM3, Vol. 16, Issue 02, 025501, (April 2017) https://doi.org/10.1117/12.10.1117/1.JMM.16.2.025501

KEYWORDS: Camera shutters, James Webb Space Telescope, Space telescopes, Optical fabrication, Magnetism, Telescopes, Microelectromechanical systems, Silicon, Aerospace engineering, Astronomical imaging

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Proceedings Article | 28 August 2014 Paper

Mechanical behavior of microelectromechanical microshutters

Devin Burns, Justin Jones, Mary Li

Proceedings Volume 9170, 917009 (2014) https://doi.org/10.1117/12.2060449

KEYWORDS: Digital image correlation, Sensors, Aluminum, Microelectromechanical systems, Silicon, Camera shutters, Cameras, Finite element methods, Data modeling, Semiconducting wafers

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Proceedings Article | 26 September 2013 Paper

Calibration and flight qualification of FORTIS

Brian Fleming, Stephan McCandliss, Keith Redwine, Mary Elizabeth Kaiser, Jeffery Kruk, Paul Feldman, Alexander Kutyrev, Mary Li, S. Moseley, Oswald Siegmund, John Vallerga, Adrian Martin

Proceedings Volume 8859, 88590Q (2013) https://doi.org/10.1117/12.2024189

KEYWORDS: Calibration, Camera shutters, Sensors, Carbon monoxide, Telescopes, Mirrors, Polonium, Imaging spectroscopy, James Webb Space Telescope, Microchannel plates

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Proceedings Article | 14 September 2011 Paper

Fabrication and calibration of FORTIS

Brian Fleming, Stephan McCandliss, Mary Elizabeth Kaiser, Jeffery Kruk, Paul Feldman, Alexander Kutyrev, Mary Li, David Rapchun, Eric Lyness, S. Moseley, Oswald Siegmund, John Vallerga, Adrian Martin

Proceedings Volume 8145, 81450B (2011) https://doi.org/10.1117/12.894080

KEYWORDS: Sensors, Camera shutters, Microchannel plates, Calibration, Mirrors, Imaging spectroscopy, Rockets, Telescopes, Data acquisition, Galactic astronomy

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Proceedings Article | 18 February 2011 Paper

An investigation into graphene exfoliation and potential graphene application in MEMS devices

George Fercana, Gunther Kletetschka, Vilem Mikula, Mary Li

Proceedings Volume 7928, 79280P (2011) https://doi.org/10.1117/12.878965

KEYWORDS: Graphene, Silicon, Oxides, Microelectromechanical systems, Semiconducting wafers, Reactive ion etching, Optical lithography, Adhesives, Ultrasonics, Scanning electron microscopy

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Proceedings Article | 30 July 2010 Paper

Fabrication of FORTIS

Stephan McCandliss, Brian Fleming, Mary Elizabeth Kaiser, Jeffrey Kruk, Paul Feldman, Alexander Kutyrev, Mary Li, Phillip Goodwin, David Rapchun, Eric Lyness, Ari Brown, Harvey Moseley, Oswald Siegmund, John Vallerga

Proceedings Volume 7732, 773202 (2010) https://doi.org/10.1117/12.857780

KEYWORDS: Galactic astronomy, Sensors, Camera shutters, Telescopes, Baryon acoustic oscillations, Rockets, Mirrors, James Webb Space Telescope, Imaging spectroscopy, Microchannel plates

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Proceedings Article | 17 February 2010 Paper

JWST microshutter array system and beyond

M. Li, A. D. Brown, A. Kutyrev, H. Moseley, V. Mikula

Proceedings Volume 7594, 75940N (2010) https://doi.org/10.1117/12.843728

KEYWORDS: Camera shutters, James Webb Space Telescope, Space telescopes, Optical fabrication, Magnetism, Silicon, Telescopes, Aerospace engineering, Microelectromechanical systems, Indium

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Proceedings Article | 12 May 2009 Paper

Integration of a carbon nanotube field emission electron gun for a miniaturized time-of-flight mass spectrometer

Stephanie Getty, Mary Li, Larry Hess, Nick Costen, Todd King, Patrick Roman, William Brinckerhoff, Paul Mahaffy

Proceedings Volume 7318, 731816 (2009) https://doi.org/10.1117/12.818939

KEYWORDS: Ionization, Ions, Silicon, Spectroscopy, Carbon nanotubes, Semiconducting wafers, Electron beams, Sensors, Ceramics, Chemical elements

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Proceedings Article | 15 July 2008 Paper

Project Lyman

Stephan McCandliss, Jeffrey Kruk, William Blair, Mary Elizabeth Kaiser, Paul Feldman, Gerhardt Meurer, William Dixon, David Sahnow, David Neufeld, Roxana Lupu, Brian Fleming, Stephen Smee, B. Andersson, Samuel Moseley, Alexander Kutyrev, Mary Li, George Sonneborn, Oswald Siegmund, John Vallerga, Barry Welsh, Massimo Stiavelli, Rogier Windhorst, Alice Shapley

Proceedings Volume 7011, 701120 (2008) https://doi.org/10.1117/12.789574

KEYWORDS: Galactic astronomy, Camera shutters, Stars, Sensors, Photons, Telescopes, Near ultraviolet, Ionization, Spectroscopy, James Webb Space Telescope

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We explore the design of a space mission called Project Lyman that has the goal of quantifying the ionization history of the universe from the present epoch to a redshift of z ~ 3. Observations from WMAP and SDSS show that before a redshift of z (Symbol not available. See manuscript.) 6 the first collapsed objects, possibly dwarf galaxies, emitted Lyman continuum (LyC) radiation shortward of 912 Å that reionized most of the universe. Theoretical estimates of the LyC escape fraction ( f_esc ) required from these objects to complete reionization is f_esc~10%. How LyC escapes from galactic environments, whether it induces positive or negative feedback on the local and global collapse of structures, and the role played by clumping, molecules, metallicity and dust are major unanswered theoretical questions, requiring observational constraint. Numerous intervening Lyman limit systems frustrate the detection of LyC from high z objects. They thin below z ~ 3 where there are reportedly a few cases of apparently very high fesc. At low z there are only controversial detections and a handful of upper limits. A wide-field multi-object spectroscopic survey with moderate spectral and spatial resolution can quantify f_esc within diverse spatially resolved galactic environments over redshifts with significant evolution in galaxy assemblage and quasar activity. It can also calibrate LyC escape against Lyα escape, providing an essential tool to JWST for probing the beginnings of reionization. We present calculations showing the evolution of the characteristic apparent magnitude of star-forming galaxy luminosity functions at 900 Å, as a function of redshift and assumed escape fraction. These calculations allow us to determine the required aperture for detecting LyC and conduct trade studies to guide technology choices and balance science return against mission cost. Finally we review our efforts to build a pathfinding dual order multi-object spectro/telescope with a (0.5°)² field-of-view, using a GSFC microshutter array, and crossed delay-line micro-channel plate detector.

Proceedings Article | 30 April 2008 Paper

Development and operation of the microshutter array system

M. Jhabvala, D. Franz, T. King, G. Kletetschka, A. Kutyrev, M. Li, S. Meyer, S. Moseley, S. Schwinger, R. Silverberg

Proceedings Volume 6959, 69590C (2008) https://doi.org/10.1117/12.775768

KEYWORDS: Camera shutters, Magnetism, James Webb Space Telescope, Silicon, Semiconducting wafers, Photography, Cryogenics, Indium, Metals, Electrodes

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Proceedings Article | 26 September 2007 Paper

A microshutter-based field selector for JWST's multi-object near infrared spectrograph

Robert Silverberg, Richard Arendt, David Franz, Gunther Kletetschka, Alexander Kutyrev, Mary Li, S. Harvey Moseley, David Rapchun, Stephen Snodgrass, David Sohl, Leroy Sparr

Proceedings Volume 6678, 66780Q (2007) https://doi.org/10.1117/12.736118

KEYWORDS: James Webb Space Telescope, Spectrographs, Electronics, Galactic astronomy, Near infrared, Astronomical imaging, Camera shutters, Silicon, Space telescopes, Imaging spectroscopy

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Proceedings Article | 20 September 2007 Paper

Microshutter array system for James Webb Space Telescope

M. Li, T. Adachi, C. Allen, S. Babu, S. Bajikar, M. Beamesderfer, R. Bradley, N. Costen, Kevin Denis, A. Ewin, D. Franz, L. Hess, R. Hu, K. Jackson, M. Jhabvala, D. Kelly, T. King, G. Kletetschka, A. Kutyrev, B. Lynch, S. Meyer, T. Miller, S. Moseley, V. Mikula, B. Mott, L. Oh, J. Pontius, D. Rapchun, C. Ray, S. Schwinger, P. Shu, R. Silverberg, W. Smith, S. Snodgrass, D. Sohl, L. Sparr, R. Steptoe-Jackson, R. Thate, F. Wang, L. Wang, Y. Zheng, C. Zincke

Proceedings Volume 6687, 668709 (2007) https://doi.org/10.1117/12.734152

KEYWORDS: Camera shutters, Electrodes, Indium, Magnetism, James Webb Space Telescope, Silicon, Optical fabrication, Metals, Space telescopes, Sensors

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Proceedings Article | 3 May 2007 Paper

Complex MEMS device: microshutter array system for space applications

Mary Li, Tomoko Adachi, Christine Allen, Sachi Babu, Sateesh Bajikar, Michael Beamesderfer, Ruth Bradley, Kevin Denis, Nick Costen, Audrey Ewin, Dave Franz, Larry Hess, Ron Hu, Kamili Jackson, Murzy Jhabvala, Dan Kelly, Todd King, Gunther Kletetschka, Alexander Kutyrev, Barney Lynch, Timothy Miller, Harvey Moseley, Vilem Mikula, Brent Mott, Lance Oh, James Pontius, Dave Rapchun, Chris Ray, Knute Ray, Eric Schulte, Scott Schwinger, Peter Shu, Robert Silverberg, Wayne Smith, Steve Snodgrass, David Sohl, Leroy Sparr, Rosalind Steptoe-Jackson, Veronica Valeriano, Liqin Wang, Yun Zheng, Chris Zincke

Proceedings Volume 6556, 655602 (2007) https://doi.org/10.1117/12.721502

KEYWORDS: Camera shutters, Electrodes, Magnetism, Indium, Silicon, James Webb Space Telescope, Optical fabrication, Metals, Microelectromechanical systems, Space telescopes

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Proceedings Article | 20 December 2006 Open Access

MEMS microshutter arrays for James Webb Space Telescope

Mary Li, Tomoko Adachi, Christine Allen, Sachi Babu, Sateesh Bajikar, Michael Beamesderfer, Ruth Bradley, Kevin Denis, Nick Costen, Audrey Ewin, David Franz, Larry Hess, Ron Hu, Kamili Jackson, Murzy Jhabvala, Dan Kelly, Todd King, Gunther Kletetschka, Alexander Kutyrev, Barney Lynch, Timothy Miller, Harvey Moseley, Vilem Mikula, Brent Mott, Lance Oh, James Pontius, David Rapchun, Chris Ray, Eric Schulte, Scott Schwinger, Peter Shu, Robert Silverberg, Wayne Smith, Steve Snodgrass, David Sohl, Leroy Sparr, Rosalind Steptoe-Jackson, Valeriano Veronica, Liqin Wang, Yun Zheng, Chris Zincke

Proceedings Volume 6415, 64150B (2006) https://doi.org/10.1117/12.706308

KEYWORDS: Camera shutters, Electrodes, Indium, Magnetism, Silicon, James Webb Space Telescope, Optical fabrication, Metals, Microelectromechanical systems, Space telescopes

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Proceedings Article | 1 July 2005 Paper

Thermal-stress control of microshutter arrays in cryogenic applications for the James Webb Space Telescope

Daniel Kelly, Wen-Hsien Chuang, Larry Hess, Ron Hu, Murzy Jhabvala, Todd King, Mary Li, James Loughlin, S. Harvey Moseley, Christopher Ray, Yun Zheng

Proceedings Volume 5836, (2005) https://doi.org/10.1117/12.608754

KEYWORDS: Camera shutters, Electrodes, Metals, Silicon, Cryogenics, James Webb Space Telescope, Aluminum, Magnetism, Silicon films, Spectroscopy

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Proceedings Article | 23 February 2005 Paper

Microshutter array development for the James Webb space telescope

Mary Li, Nadine Acuna, Edward Amatucci, Michael Beamesderfer, Ray Boucarut, Sachi Babu, Sateesh Bajikar, Audrey Ewin, Rainer Fettig, David Franz, Larry Hess, Ron Hu, Murzy Jhabvala, Daniel Kelly, Todd King, Gunther Kletetschka, Carl Kotechi, Alexander Kutyrev, James Loughlin, Bernard Lynch, Harvey Moseley, Brent Mott, Bill Newell, Lance Oh, David Rapchun, Chris Ray, Carol Sappington, Eric Schulte, Scott Schwinger, Wayne Smith, Steve Snodgrass, Leroy Sparr, Rosalind Steptoe-Jackson, Liqin Wang, Yun Zheng, Chris Zincke

Proceedings Volume 5650, (2005) https://doi.org/10.1117/12.581861

KEYWORDS: Camera shutters, Electrodes, Silicon, Metals, Magnetism, James Webb Space Telescope, Optical fabrication, Microelectromechanical systems, Semiconducting wafers, Reactive ion etching

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Proceedings Article | 12 October 2004 Paper

Microshutters arrays for the JWST near-infrared spectrometer

Samuel Moseley, Richard Arendt, Rene Boucarut, Murzy Jhabvala, Todd King, Gunther Kletetschka, Alexander Kutyrev, Mary Li, Stephen Meyer, David Rapchun, Robert Silverberg

Proceedings Volume 5487, (2004) https://doi.org/10.1117/12.552431

KEYWORDS: Camera shutters, James Webb Space Telescope, Electrodes, Silicon, Spectrographs, Magnetism, Prototyping, Failure analysis, Near infrared, Galactic astronomy

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Proceedings Article | 11 March 2003 Paper

Probing the phase transition of Mo/Au TES microcalorimeters

Mark Lindeman, Simon Bandler, Regis Brekosky, James Chervenak, Enectali Figueroa-Feliciano, Fred Finkbeiner, Massimiliano Galeazzi, Mary Li, Caroline Stahle

Proceedings Volume 4851, (2003) https://doi.org/10.1117/12.461466

KEYWORDS: Resistance, Error analysis, Superconductors, Data modeling, Molybdenum, Gold, X-rays, Transition metals, Temperature metrology, Tellurium

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Proceedings Article | 11 March 2003 Paper

Position-sensitive microcalorimeters for large-field high-energy resolution astrophysics

Enectali Figueroa-Feliciano, Kevin Boyce, Jay Chervenak, Fred Finkbeiner, Rich Kelley, Mary Li, Mark Lindeman, Scott Porter, Caroline Stahle

Proceedings Volume 4851, (2003) https://doi.org/10.1117/12.461424

KEYWORDS: X-rays, Sensors, Image resolution, Absorption, Astrophysics, Spectroscopy, X-ray telescopes, Imaging spectroscopy, Telescopes, Quantum efficiency

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Proceedings Article | 17 February 2003 Paper

Recent progress on photon-counting superconducting detectors for submillimeter astronomy

J. Teufel, Thomas Stevenson, W. T. Hsieh, Mary Li, K. Rhee, Carl Stahle, Ed Wollack, A. Aassime, P. Delsing, P. Wahlgren, Daniel Prober, Robert Schoelkopf

Proceedings Volume 4855, (2003) https://doi.org/10.1117/12.459712

KEYWORDS: Sensors, Antennas, Quasiparticles, Photons, Superconductors, Aluminum, Optical amplifiers, Amplifiers, Astronomy, Multiplexing

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Proceedings Article | 16 January 2003 Paper

Microshutter arrays for near-infrared applications on the James Webb Space Telescope

Mary Li, Alex Bier, Rainer Fettig, David Franz, R. Hu, T. King, Alexander Kutyrev, Bernard Lynch, Samuel Moseley, David Mott, David Rapchun, Robert Silverberg, Wayne Smith, L. Wang, Yun Zheng, C. Zinke

Proceedings Volume 4981, (2003) https://doi.org/10.1117/12.476285

KEYWORDS: Camera shutters, Electrodes, Metals, Silicon, Photomasks, James Webb Space Telescope, Magnetism, Semiconducting wafers, Microelectromechanical systems, Oxides

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Proceedings Article | 14 November 2002 Paper

Film stress of microshutter arrays for the James Webb Space Telescope

Yun Zheng, Shu-Fan Cheng, Rainer Fettig, Mary Li, Brent Mott, Harvey Moseley

Proceedings Volume 4935, (2002) https://doi.org/10.1117/12.476118

KEYWORDS: Iron, Camera shutters, Silicon, Aluminum, James Webb Space Telescope, Sputter deposition, Spectroscopy, Magnetism, Space telescopes, Semiconducting wafers

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Proceedings Article | 2 October 2001 Paper

Magnetically actuated microshutter arrays

David Mott, Shahid Aslam, Kenneth Blumenstock, Rainer Fettig, David Franz, Alexander Kutyrev, Mary Li, Carlos Monroy, Samuel Moseley, David Schwinger

Proceedings Volume 4561, (2001) https://doi.org/10.1117/12.443109

KEYWORDS: Camera shutters, Electrodes, Silicon, Semiconducting wafers, Magnetism, Oxides, Deep reactive ion etching, Etching, Reactive ion etching, Space telescopes

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Proceedings Article | 30 April 2001 Paper

Fabrication of microshutter arrays for space application

Mary Li, I. Aslam, Audrey Ewin, Rainer Fettig, David Franz, Carl Kotecki, Alexander Kutyrev, Samuel Moseley, Carlos Monroy, David Mott, Yun Zheng

Proceedings Volume 4407, (2001) https://doi.org/10.1117/12.425314

KEYWORDS: Camera shutters, Etching, Semiconducting wafers, Silicon, Deep reactive ion etching, Magnetism, Electrodes, Oxides, Space telescopes, Microelectromechanical systems

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Proceedings Article | 13 December 2000 Paper

Progress in the development of Mo/Au transition-edge sensors for x-ray spectroscopy

Caroline Stahle, Regis Brekosky, Enectali Figueroa-Feliciano, Fred Finkbeiner, John Gygax, Mary Li, Mark Lindeman, Frederick Porter, Nilesh Tralshawala

Proceedings Volume 4140, (2000) https://doi.org/10.1117/12.409131

KEYWORDS: Resistance, Interference (communication), Phonons, Sensors, X-rays, Superconductors, Silicon, Signal to noise ratio, X-ray astronomy, Aluminum

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Proceedings Article | 13 December 2000 Paper

Position-sensing transition-edge sensors for large-field high-energy-resolution x-ray imaging spectroscopy

Enectali Figueroa-Feliciano, Caroline Stahle, Fred Finkbeiner, Mary Li, Mark Lindeman, Nilesh Tralshawala, Carl Stahle

Proceedings Volume 4140, (2000) https://doi.org/10.1117/12.409138

KEYWORDS: Sensors, X-rays, Bismuth, X-ray imaging, Gold, Image resolution, Silicon, Photons, Imaging spectroscopy, Spectrometers

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Proceedings Article | 22 August 2000 Paper

Status of the development of a 128x128 microshutter array

Samuel Moseley, Rainer Fettig, Alexander Kutyrev, Mary Li, David Mott, Bruce Woodgate

Proceedings Volume 4178, (2000) https://doi.org/10.1117/12.396500

KEYWORDS: Camera shutters, Silicon, Semiconducting wafers, Etching, Ions, Deep reactive ion etching, Reactive ion etching, Micromirrors, Astronomical imaging, Spectroscopy

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Proceedings Article | 22 October 1999 Paper

Toward a 2-eV microcalorimeter x-ray spectrometer for Constellation-X

Caroline Stahle, Simon Bandler, Troy Barbee, Jeffrey Beeman, Regis Brekosky, Blas Cabrera, Mark Cunningham, Steven Deiker, Enectali Figueroa-Feliciano, Fred Finkbeiner, Matthias Frank, Keith Gendreau, Eugene Haller, Gene Hilton, Kent Irwin, Richard Kelley, Simon Labov, Mary Li, Norman Madden, John Martinis, Dan McCammon, Sae Woo Nam, Frederick Porter, Herbert Schnopper, Eric Silver, Andrew Szymkowiak, Gregory Tucker, Arthur Walker, D. Wollman

Proceedings Volume 3765, (1999) https://doi.org/10.1117/12.366490

KEYWORDS: X-rays, Spectroscopy, Sensors, Silicon, Superconductors, Germanium, Semiconductors, Interference (communication), Phonons, Quasiparticles

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Proceedings Article | 1 October 1999 Paper

Design and fabrication of novel photodetector arrays

Mary Li, Christine Allen, Shahid Aslam, Tina Chen, Fred Finkbeiner, Scott Gordon, Jonathan Kuhn, David Mott, Carl Stahle, Caroline Stahle, Nilesh Tralshawala, Liqin Wang

Proceedings Volume 3892, (1999) https://doi.org/10.1117/12.364483

KEYWORDS: Molybdenum, Silicon, Sensors, Superconductors, Gold, Silver, Scanning electron microscopy, Semiconducting wafers, Aluminum, Detector arrays

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Proceedings Article | 30 August 1999 Paper

Fabrication of pop-up detector arrays on Si wafers

Mary Li, Christine Allen, Scott Gordon, Jonathan Kuhn, David Mott, Caroline Stahle, Liqin Wang

Proceedings Volume 3874, (1999) https://doi.org/10.1117/12.361247

KEYWORDS: Sensors, Silicon, Detector arrays, Semiconducting wafers, Structural design, Scanning electron microscopy, Infrared sensors, Computer simulations, Infrared bolometers, X-rays

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High sensitivity is a basic requirement for a new generation of thermal detectors. To meet the requirement, close-packed, 2D silicon detector arrays have been developed in NASA Goddard Space Flight Center. The goal of the task is to fabricate detector arrays configured with thermal detectors such as IR bolometers and x-ray calorimeters to use in space flight missions. This paper focuses on the fabrication and the mechanical testing of detector arrays in a 0.2 mm pixel size, the smallest pop-up detectors being developed so far. These array structures, nicknamed 'PUDs' for 'Pop-Up Detectors', are fabricated on 1 micrometers thick, single-crystal, silicon membranes. Their designs have been refined so we can utilize the flexibility of thin silicon films by actually folding the silicon membranes to 90 degrees in order to obtain close-packed 2D arrays. The PUD elements consist of a detector platform and two legs for mechanical support while also serving as electrical and thermal paths. Torsion bars and cantilevers connecting the detector platform to the legs provide additional flexures for strain relief. Using micro- electromechanical structure fabrication techniques, including photolithography, anisotropic chemical etching, reactive-ion etching, and laser dicing, we have fabricated PUD detector arrays of fourteen designs with a variation of four parameters including cantilever length, torsion bar length and width, and leg length. Folding test were conducted to test mechanical stress distribution for the array structures. We obtained folding yields and selected optimum design parameters to reach minimal stress levels. Computer simulation was also employed to verify mechanical behaviors of PUDs in the folding process. In addition, scanning electron microscopy was utilized to examine the flatness of detectors and the alignment of detector pixels in arrays. The fabrication of thermistor and heaters on the pop-up detectors is under way, preparing us for the next step of the experiment, the thermal test.

Showing 5 of 33 publications

Conference Committee Involvement (7)

Micro- and Nanotechnology Sensors, Systems, and Applications II

5 April 2010 | Orlando, Florida, United States

Micro- and Nanotechnology Sensors, Systems, and Applications

15 April 2009 | Orlando, Florida, United States

Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems IV

10 December 2008 | Melbourne, Australia

Micro (MEMS) and Nanotechnologies for Space, Defense, and Security II

18 March 2008 | Orlando, Florida, United States

MEMS/MOEMS Technologies and Applications III

12 November 2007 | Beijing, China

Showing 5 of 7 Conference Committees

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