Maryann C. Tung
at
SPIE Involvement:
Author
Publications (4)

PROCEEDINGS ARTICLE | March 28, 2017
Proc. SPIE. 10148, Design-Process-Technology Co-optimization for Manufacturability XI
KEYWORDS: Lithography, Electron beam lithography, Mirrors, Optical lithography, Polymers, Manufacturing, Directed self assembly, Extreme ultraviolet lithography, Semiconducting wafers, Algorithms

SPIE Journal Paper | November 7, 2016
JM3 Vol. 15 Issue 04
KEYWORDS: Directed self assembly, Optical lithography, Metals, Photomasks, Lithography, Algorithm development, Immersion lithography, Molecular self-assembly, Electronic design automation, Extreme ultraviolet

PROCEEDINGS ARTICLE | March 16, 2016
Proc. SPIE. 9781, Design-Process-Technology Co-optimization for Manufacturability X
KEYWORDS: Lithography, Optical lithography, Polymethylmethacrylate, Manufacturing, Photomasks, Extreme ultraviolet, Directed self assembly, Double patterning technology, Immersion lithography, Computer aided design, Algorithm development, Design for manufacturability

PROCEEDINGS ARTICLE | March 19, 2015
Proc. SPIE. 9423, Alternative Lithographic Technologies VII
KEYWORDS: Polymethylmethacrylate, Etching, Interfaces, Silicon, 3D modeling, Platinum, Scanning electron microscopy, Transmission electron microscopy, Directed self assembly, System on a chip

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