Dr. Masaaki Kurihara
General Manager at Dai Nippon Printing Co Ltd
SPIE Involvement:
Publications (36)

Proceedings Article | 1 December 2022 Presentation + Paper
Koji Ichimura, Koji Yoshida, Hideki Cho, Ryugo Hikichi, Masaaki Kurihara
Proceedings Volume 12293, 122930F (2022) https://doi.org/10.1117/12.2643250
KEYWORDS: Nanoimprint lithography, Critical dimension metrology, Overlay metrology, Image processing, Fabrication, Scanning electron microscopy, Semiconductor manufacturing, Quartz, Lithography, Semiconductors

Proceedings Article | 12 October 2018 Presentation
Proceedings Volume 10810, 108100G (2018) https://doi.org/10.1117/12.2501754
KEYWORDS: Nanoimprint lithography, Photomasks, Lithography, Process control

Proceedings Article | 19 March 2018 Presentation
Proceedings Volume 10584, 105840P (2018) https://doi.org/10.1117/12.2299778
KEYWORDS: Nanoimprint lithography, Photomasks, Lithography, Semiconductors

Proceedings Article | 27 April 2017 Presentation
Koji Ichimura, Ryugo Hikichi, Saburo Harada, Koichi Kanno, Masaaki Kurihara, Naoya Hayashi
Proceedings Volume 10144, 101440D (2017) https://doi.org/10.1117/12.2263460
KEYWORDS: Printing, Current controlled current source, Nanoimprint lithography, Optical lithography, Lithography, Semiconductors, Electron beam lithography, Extreme ultraviolet lithography, Photomasks, Semiconducting wafers

SPIE Journal Paper | 5 February 2016
JM3, Vol. 15, Issue 02, 021006, (February 2016) https://doi.org/10.1117/12.10.1117/1.JMM.15.2.021006
KEYWORDS: Nanoimprint lithography, High volume manufacturing, Image processing, Critical dimension metrology, Lithography, Semiconductors, Semiconducting wafers, Photomasks, Ultraviolet radiation, Liquids

Showing 5 of 36 publications
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